A Review of Data Mining Applications in Semiconductor Manufacturing

نویسندگان

چکیده

For decades, industrial companies have been collecting and storing high amounts of data with the aim better controlling managing their processes. However, this vast amount information hidden knowledge implicit in all could be utilized more efficiently. With help mining techniques unknown relationships can systematically discovered. The production semiconductors is a highly complex process, which entails several subprocesses that employ diverse array equipment. size signifies number units produced, require huge order to able control improve semiconductor manufacturing process. Therefore, paper structured review made through sample 137 papers published articles scientific community regarding applications manufacturing. A detailed bibliometric analysis also made. All are classified function application area. results then analyzed conclusions drawn.

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ژورنال

عنوان ژورنال: Processes

سال: 2021

ISSN: ['2227-9717']

DOI: https://doi.org/10.3390/pr9020305